Keywords

#multilayer_soft_lithography

Multilayer soft lithography

Multilayer soft lithography (MSL) is a fabrication process in which microscopic chambers, channels, valves and vias are molded within bonded layers of elastomer.

Mon 5th

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Multilayer soft lithography Soft lithography Extreme ultraviolet lithography Nanolithography Bio-MEMS MSL Richard R. Freeman Nanosphere lithography Dip-pen nanolithography Printed circuit board
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