#phosphosilicate_glass
Phosphosilicate glass
Type of glass commonly used in semiconductor device fabrication
Phosphosilicate glass, commonly referred to by the acronym PSG, is a silicate glass commonly used in semiconductor device fabrication for intermetal layers, i.e., insulating layers deposited between succeedingly higher metal or conducting layers, due to its effect in gettering alkali ions. Another common type of phosphosilicate glass is borophosphosilicate glass (BPSG).
Wed 27th
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