Sensitive high-resolution ion microprobe

The sensitive high-resolution ion microprobe is a large-diameter, double-focusing secondary ion mass spectrometer (SIMS) sector instrument that was produced by Australian Scientific Instruments in Canberra, Australia and now has been taken over by Chinese company Dunyi Technology Development Co. (DTDC) in Beijing. Similar to the IMS 1270-1280-1300 large-geometry ion microprobes produced by CAMECA, Gennevilliers, France and like other SIMS instruments, the SHRIMP microprobe bombards a sample under vacuum with a beam of primary ions that sputters secondary ions that are focused, filtered, and measured according to their energy and mass.

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