Transfer length method

Transfer length method (a.k.a. Transmission line measurement)

The Transfer Length Method or the "Transmission Line Model" is a technique used in semiconductor physics and engineering to determine the specific contact resistivity between a metal and a semiconductor. TLM has been developed because with the ongoing device shrinkage in microelectronics the relative contribution of the contact resistance at metal-semiconductor interfaces in a device could not be neglected any more and an accurate measurement method for determining the specific contact resistivity was required.

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