#white_light_interferometry
White light interferometry
Measurement technique
As described here, white light interferometry is a non-contact optical method for surface height measurement on 3D structures with surface profiles varying between tens of nanometers and a few centimeters. It is often used as an alternative name for coherence scanning interferometry in the context of areal surface topography instrumentation that relies on spectrally-broadband, visible-wavelength light.
Tue 18th
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