Keywords

#hybrid_physical–chemical_vapor_deposition

Hybrid physical–chemical vapor deposition

Thin-film deposition technique

Hybrid physical–chemical vapor deposition (HPCVD) is a thin-film deposition technique, that combines physical vapor deposition (PVD) with chemical vapor deposition (CVD).

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Chemical vapor deposition Hybrid physical–chemical vapor deposition Atomic layer deposition Magnesium diboride Chemical beam epitaxy Perovskite solar cell Synthetic diamond Zinc oxide nanostructure Molecular layer deposition Graphene
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